{"product_id":"156139","title":"87-000-028","description":"\u003cp\u003e14 PROFILOMETER PLATES - CALIBRATION TEST PLATES - ULTRASONIC THICKNESS GAUGES OR OPTICAL SURFACE PROFILOMETERS - optical surface roughness calibration plate (specifically a reference specimen used for optical surface profilometers or contact-stylus instruments) - Meaning of the Markings\\(\\mathbf{R=15}\\): This denotes the radius of curvature (R) of the inner spherical target area, measuring exactly 15 mm. It provides a certified curved surface profile used to calibrate the lateral and vertical response of the profilometer.\\(\\mathbf{\\Delta =2}\\): This represents the depth (Δ) or step height of the concentric groove\/feature, measuring exactly 2 μm (micrometers). This serves as a precision reference standard for verifying vertical height and depth measurement accuracy.Calibration and UsageInstrument Verification: Optical profilometers use this plate to calibrate their 3D surface mapping, ensuring that both flat and spherical geometric calculations match international standard benchmarks.Storage \u0026amp; Handling: It is stored in its protective sealed plastic casing to prevent scratches, dust accumulation, or oxidation, any of which would permanently alter the sub-micron accuracy of the calibration markings. The part number 87-000-028 corresponds to an official Phase Shift Technology (later acquired by ADE Phase Shift, and subsequently KLA-Tencor) reference calibration standard designed for MicroXAM or NewView series optical 3D surface profilometers. Part Specifications \u0026amp; OriginManufacturer: Phase Shift Technology \/ ADE Phase Shift (KLA)Component Type: Combined Curvature and Step Height Calibration Master PlateTraceability: These plates were originally shipped with certified NIST-traceable parameters matching the precision laser-etched parameters on the face (R=15 mm, Δ=2 μm).Functionality in MetrologyZ-Axis Linear Calibration: The Δ = 2 μm groove calibrates the vertical step-height linearity of your optical interference objectives.X\/Y Spatial Distortion Calibration: The R = 15 mm master spherical radius maps the pixel-to-micron geometric field accuracy across the sensor, ensuring 3D topographies are not geometrically skewed. Profilometers are highly advanced precision instruments used to measure the surface topography, roughness, flatness, step heights, and microscopic geometry of a material - HEIGHT GAUGE CALIBRATION PLATES - BLAKE INDUSTRIES - SCOTCH PLAINS NJ\u003c\/p\u003e","brand":"ADE Phase Shift - KLA-Tencor","offers":[{"title":"Default Title","offer_id":45789299081269,"sku":null,"price":1275.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0219\/7936\/5440\/files\/AP1GczNt-OJ00j7typC5XmwCCO477HB50NUAScXEEurnwZTO2SX7JZs8rOqo58RldnTfmOJFrhdqse5HQr20F5ps5TbN0vH_xpbmI75v3Q5J4c2DBf4zVzFaZD0PMmFDyq9vUactQNU-NDfKUgBkDZ4kfVzCJQ_w1632-h1632-s-no-gm.jpg?v=1784676650","url":"https:\/\/greenbrookonline.com\/products\/156139","provider":"Green Brook Online","version":"1.0","type":"link"}