1979-0001-101

10PACK Hot filament FOR NV6200 ION IMPLANTER - electrograph 26562 - OEM tungsten source filament designed for the Eaton / Axcelis NV6200 series ion implanter - Component Type: Ion Source Filament.Primary Application: Axcelis Technologies (formerly Eaton Semiconductor Equipment Division) NV6200, NV6200AV, and NV6200HV medium-current ion implantation systems.Function: It acts as the primary electron emitter inside the arc chamber to ionize dopant gases (like Phosphine, Arsine, or Boron Trifluoride) into an ion beam for semiconductor wafer processing