0342-0563-3001C

Source Plate used specifically in the NV6200 Ion Implanter, a piece of semiconductor manufacturing equipment - OEM Part Number: 0342-0563-3001 (with the C suffix usually denoting a revision, material variant, or specific kit component). ION BEAM SERVICES - Manufacturer: Originally manufactured by the Eaton Corporation Semiconductor Equipment Operations, which later spun off to become Axcelis Technologies.System Type: Used inside high-vacuum, high-voltage ion implantation systems designed for doping silicon wafers during semiconductor fabrication.Component Function: Located within the ion source chamber section of the Axcelis / Eaton NV6200 platform, the source plate serves as a structural or shielding interface mount near the ion generation and extraction assemblies - NOS - 1993 - 0342-0563-3001 NEW